Abstract
The structure of ZrO 2-CaO films, which were prepared by vacuum deposition and crystallized by electron beam heating, was investigated by high resolution electron microscopy. In an amorphous ZrO 2 film obtained from the deposition of pure ZrO 2, monoclinic ZrO 2 crystals which are stable below 1170°C were obtained on heating in vacuum. In a film obtained from the deposition of ZrO 2 and CaCO 3, Zr(Ca)O 2− x crystals grew in a solid solution of ZrO 2 with CaO. It was observed that, in ZrO 2-20mol.%CaO films, ordered CaZrO 3 crystals and CaZr 4O 9 (Φ 1 phase) crystals were precipitated in the Zr(Ca)O 2− x crystals. Not only the lattice orientation relationship but also the atom configuration relationship of these crystals with the Zr(Ca)O 2− x crystal were established. Calcium ion walls with anion vacancies were found along the (001), (1̄10) and (1̄11) planes in the Zr(Ca)O 2− x crystals.
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