Abstract
An LC resonant pressure sensor with improved performance is presented in this paper. The sensor is designed with a buried structure, which protects the electrical components from contact with harsh environments and reduces the resonant-frequency drift of the sensor in high-temperature environments. The pressure-sensitive membrane of the sensor is optimized according to small-deflection-plate theory, which allows the sensor to operate in high-pressure environments. The sensor is fabricated using low-temperature co-fired ceramic (LTCC) technology, and a fugitive film is used to create a completed sealed embedded cavity without an evacuation channel. The experimental results show that the frequency drift of the sensor versus the temperature is approximately 0.75 kHz/°C, and the responsivity of the sensor can be up to 31 kHz/bar within the pressure range from atmospheric pressure to 60 bar.
Highlights
The measurement of pressure parameters in harsh environments such as those experienced at high temperatures has become increasingly critical in automotive, aerospace, and industrial applications [1,2,3].Despite the successful development of many pressure sensors relying on piezoresistance for high-temperature pressure monitoring, these sensors are based on silicon or silicon-on-insulator (SOI), which cannot operate in higher-temperature environments because the leakage current across the junctions changes drastically, and the sensor readings become invalid [4,5,6,7]
A high-temperature pressure sensor based on low-temperature co-fired ceramic (LTCC) technology was designed and fabricated by the Georgia Institute of Technology in 2002, but the sensor has a large temperature drift in high-temperature environments, which will affect the accuracy for pressure testing in such environments [9,10]
In order to overcome the small pressure measurement range and large temperature drift, a high-performance embedded pressure sensor fabricated using LTCC technology by model design optimization is presented in this paper
Summary
The measurement of pressure parameters in harsh environments such as those experienced at high temperatures has become increasingly critical in automotive, aerospace, and industrial applications [1,2,3]. Some pressure sensors based on low-temperature co-fired ceramic (LTCC) materials have been developed, but their performance is poor. A high-temperature pressure sensor based on LTCC technology was designed and fabricated by the Georgia Institute of Technology in 2002, but the sensor has a large temperature drift in high-temperature environments, which will affect the accuracy for pressure testing in such environments [9,10]. In order to overcome the small pressure measurement range and large temperature drift, a high-performance embedded pressure sensor fabricated using LTCC technology by model design optimization is presented in this paper. The fabricated pressure sensor can be applied in extreme harsh environments, where an LC resonance circuit was embedded in a ceramic substrate. The appropriate experimental test platforms are designed and set up to verify the performance of the fabricated sensor in high-temperature and high-pressure environments
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