A high performance IGBT with new n+buffer structure

Abstract

An advanced IGBT with a new n+buffer structure has been developed. The new n+buffer structure is that some n+buried layers are formed at the boundary between a p+substrate and a n+buffer layer. The concentration of the n+buried layers is almost the same as that of the p+substrate. The fabrication of the IGBT with the new n+buffer structure used a 3rd gen 600 V/100 A chip. Taking the VVVF inverter as an application, total power loss generated was about 12% less compared to the conventional IGBT, only changing the n+buffer structure. And the short circuit safe operating area of the new IGBT was almost similar to the conventional IGBT. Moreover, we discussed differences between the new IGBT and the conventional IGBT using a 3D simulator, DAVINCI.