Abstract

Ultrasonic transducers using aromatic polyurea piezoelectric thin film are studied in this report. Polyurea thin film is deposited with vapor deposition polymerization with an optimum temperature condition. First, polyurea thin film of 5 µm in thickness was deposited on a Si substrate, and it showed resonant frequency of 156 MHz. Second, we made a concave point focus transducer, a cylindrical line focus transducer, and a variable focus transducer. We obtained images of staple using the concave point focusing transducer. Finally, we measured the V(z) curve of aluminum surface by the cylindrical line focus transducer.

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