Abstract

AbstractA high‐frequency, low‐coupling 8‐shaped differential inductor with patterned ground shield (PGS) is presented in this paper. The differential structure formed by two single‐inductors in stepping order makes high‐fSR (self‐resonant‐frequency) possible and it also suppresses the far‐field magnetic coupling. A PGS structure not only maximizes the Q‐factor but also improves simulation time and accuracy of EM‐simulation. The test chip is implemented in TSMC 0.18um 1‐poly, 6‐metal CMOS process and the measurement results showed good match with EM‐simulation.

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