Abstract
This paper focuses on the design, fabrication, assembly, and testing of high bandwidth two-axis mirror positioners for precision optical platforms, which we refer to as the Advanced Fast Steering Mirror (AFSM) and the small Advanced Fast Steering Mirror (sAFSM). These novel positioners consist of a mirror platform driven in two rotational axes by flux-steering electromagnetic actuators, and controlled via position feedback loops. The devices are designed for beam stabilization tasks in lithography, laser communication, lidar, and similar optical applications. We have experimentally demonstrated small-signal system bandwidth of 10kHz using optical quad-cell feedback and a two-channel analog control architecture. The AFSM has a travel range of ±3.5mrad, and a measured angular acceleration of 1×105rad/s2.
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