Abstract

To meet measurement needs in harsh environments, such as high temperature and rotating applications, a wireless passive Low Temperature Co-fired Ceramics (LTCC) temperature sensor based on ferroelectric dielectric material is presented in this paper. As a LC circuit which consists of electrically connected temperature sensitive capacitor and invariable planar spiral inductor, the sensor has its resonant frequency shift with the variation in temperature. Within near-filed coupling distance, the variation in resonant frequency of the sensor can be detected contactlessly by extracting the impedance parameters of an external antenna. Ferroelectric ceramic, which has temperature sensitive permittivity, is used as the dielectric. The fabrication process of the sensor, which differs from conventional LTCC technology, is described in detail. The sensor is tested three times from room temperature to 700 °C, and considerable repeatability and sensitivity are shown, thus the feasibility of high performance wireless passive temperature sensor realized by LTCC technology is demonstrated.

Highlights

  • As a fundamental physical quantity, temperature is the most universal and important processing parameter in the production process

  • Based on the basic principle of a wireless passive LC sensor, this paper proposes a sensor which takes a high Curie ferroelectric dielectric material as temperature sensitive dielectric and fabricated by Low Temperature Co-fired Ceramics (LTCC) technology

  • This paper proposed a wireless passive temperature sensor based on a ferroelectric dielectric ceramic, which can be used for monitoring temperatures in harsh environments

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Summary

A Harsh Environment-Oriented Wireless Passive Temperature

Qiulin Tan 1,2, Tao Luo 1,2,*, Jijun Xiong 1,2,*, Hao Kang 1,2, Xiaxia Ji 1,2, Yang Zhang 1,2, Mingliang Yang 1,2, Xiaolong Wang 1,2, Chenyang Xue 1,2, Jun Liu 1,2 and Wendong Zhang 1,2. Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China. Received: 12 December 2013; in revised form: 30 January 2014 / Accepted: 14 February 2014 /

Introduction
Sensor Principle
Sensor Design and Fabrication
Measurement Results
Conclusions and Future Works
Full Text
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