Abstract
A two-pole, half-mode substrate-integrated-waveguide (HMSIW) RF MEMS tunable filter with 28% tuning range around 1.4 GHz is presented. The filter occupies a total area of λ <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g</sub> × 0.7λg @ 1.4 GHz and exhibits an insertion loss of 1.2-3.4 dB, return loss better than 11 dB and quality factor of 75-140 for all tuning states, while having excellent linearity. The filter maintains a constant absolute 1 dB bandwidth of 85 ±10 MHz over the filter tuning range. Circuit models for the tunable HMSIW resonator and a methodology for systematic filter design are also described in detail.
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