A global model and two-dimensional simulation study of a low-pressure inductively coupled CF4 plasma considering non-Maxwellian EEDF

Abstract

We analyze the discharge characteristics of a low-pressure inductively coupled CF4 plasma using a global model and a two-dimensional (2D) simulation. We first conducted a study comparing the experimental results with the global model, which makes it easier to compare the trend concerning external parameters and less computationally expensive, to validate the chemical reaction data, and then, compared the experimental results with the 2D simulation results. We then analyzed the discharge characteristics by comparing the 2D model results with the global model at various gas pressures and powers. The simulations were performed using COMSOL software, which is based on a fluid model. The electron energy distribution function (EEDF) was solved self-consistently using the Boltzmann equation solver, and then, coupled with the fluid model. The results were more consistent with the experimental results when the EEDF was calculated by solving the Boltzmann equation than for assuming the Maxwellian EEDF. Furthermore, the global model results were similar with the mean values obtained from the 2D model. This indicates that it is efficient to first validate the electron collision cross sections and reaction coefficients using the global model. Our approach is expected to be utilized in the analysis of new gases.