A germanium(II) aminopyridinato compound and its potential as a CVD precursor

Abstract

A germanium(II) aminopyridinato compound has been synthesized and characterized by 1H and 13C NMR spectroscopy, elemental analysis and X-ray diffraction. It was easily obtained in high yield through a salt-elimination reaction by mixing the corresponding lithium salt and the GeCl2-dioxane adduct. Thermal properties, including stability, volatility, transport behavior and vapor pressure, were evaluated by thermogravimetric analysis (TGA) to confirm that it is suitable for the CVD procedure. Deposition was accomplished in a hot-wall CVD reactor system, which verified its ability as a CVD precursor for the fabrication of germanium containing films.