A geometric procedure for improved Rutherford backscattering channeling analysis of materials

Abstract

Solving geometric and sample alignment issues is a major part of multi-axial Rutherford backscattering channeling (RBS-C) analysis of materials, especially involving complicated samples. However, a geometric standard does not exist for RBS-C, which complicates experimental procedures and makes experimental methods and data presentation inconsistent among different experiments. Our approach to solving RBS-C geometric issues, discussed here, is to introduce a geometric adjustment and sample manipulation procedure which defines the orientation and rotation of the sample with respect to a fixed coordinate system. This method makes rotational, alignment and sample manipulation operations involved in RBS-C more flexible and simpler. As a test case, we present multi-axial RBS-C maps of Si obtained via this methodology. Distortions arising in such RBS-C maps due to geometric effects, how they can affect alignment procedure and data extraction, and how our approach treats these issues are discussed.