Abstract
AbstractThe transimmison function of energy analyzer LHS‐11 from Leybold‐Heraeus has been obtained from the dependence of the signal intensity on the instrument pass energy (Ep) at a given kinetic energy of the incident electrons (Ek).For the energy analyzer, the transmission function has been expressed by the equation A slight dependence of the exponent n on Ek is observed, and it has been fitted by the equation This is a very general characterization of the transmission that gives its analytical description in the whole XPS range for a given set of operational parameters, such as slit dimensions, sample size and sample position.From the transmission function obtained and using reported values of the photoionization cross‐sections, two sets of XPS sensitivity factor for several elements have been calculated. With these factors, the surface concentrations of a multi‐element sample have been determined with good agreement between the values after Mg and AI Kα excitation. These results suggest that corrections due to variations in the transmission function with Ek can improve the accuracy of the calculated sensitivity factors.
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