Abstract
A gas–contact ion source has been developed to produce a plasma characterized by a low ion temperature and a high ion density. This ion source is a hybrid type consisting of a modified plasma compression type hollow cathode ion source and a gas–contact chamber. A Faraday cup and a plane Langmuir probe measurement revealed that an increase in the flow rate of argon gas resulted in the ion temperature of plasma under 1 eV and the half value of the energy spread of ion beams under 10 eV with the ion density remaining constant (∼ 10 10 cm −3 ).
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