A gas flow velocity sensor fabricated with femtosecond laser using 4 μm ultra-thin glass sheet

Abstract

Here we proposed a gas flow sensor enabled by a 4 μm ultra-thin glass sheet with high-integration capability for applications in the fields of industry and medicine/health. The sensor was fabricated with femtosecond laser processing in a time of several minutes, which can measure the gas flow velocity by detecting the displacement (0.4 μm to 3 μm) of the ultra-thin glass sheet in a large range of 4 m s−1 to 36 m s−1 with a sensitivity of 8.21 mV m s−1. Furthermore, changing geometric parameters of the sensor, such as aspect ratio and thickness can adjust the sensitivity and dynamic range of the sensor.