Abstract
We present a new type of integrated optical refractometer, based on a Mach-Zehnder interferometer using III–V semiconductor and TiO 2 on SiO 2 waveguides. We report on the design, optimized for high sensitivity in immunoassay sensing applications, and the fabrication of this sensor chip. Using a test liquid system of ethanol in water, we demonstrate a refractive-index resolution of 1× 10 −5 for this refractometer. This device is a basic building block of a novel, monolithically integrated optical sensing circuit, which can be used for example in chemical or immunological sensing applications.
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