Abstract
In this paper, a fuzzy PID control method is proposed to control a flexible micro-cantilever in Atomic Force Microscope (AFM). The dynamic property of the flexible micro-cantilever can be approximately described by a Partial Differential Equation (PDE). The PDE can be transformed into finite-dimensional ordinary differential equations (ODEs) by using separation of variables method and truncation theory. For those odes, a fuzzy PID control strategy is presented, where a fuzzy PID controller is designed for an ODE. The fuzzy PID control strategy is applied to control the flexible micro-cantilever. The simulation results demonstrate that the proposed control strategy is effective.
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