Abstract
This paper presents a fully-differential Sigma-delta (ΣΔ) CMOS interface with chopper-stabilization (CHS) for an acceleration sensing system. The Capacitive sensor interface consists of a front-end capacitance to voltage converter (CVC) and a back-end second-order switched-capacitor (SC) ΣΔ modulator. Correlated-Double-Sampling (CDS) techniques and CHS were used in the charge amplifier to remove the parasitic capacitance of MEMS sensor and the noise from the readout electronic circuit. This architecture decouples the MEMS sensor from the optimized-performance ΣΔ modulator. The top-down methodology has been followed for the design of the interface. This work is designed and implemented in a 0.35um CMOS technology with 3.3V supply voltage. Simulation results show sensitivity of 0.55V/g is achieved in the range of ±1g with a 5.12MHz sampling frequency.
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