Abstract
A 16 /spl times/ 8 sensor array chip for fully electronic DNA detection is presented. The sensor principle is based on an electrochemical redox cycling process. The chip is fabricated on the basis of an extended 0.5 /spl mu/m CMOS process. Each sensor site of the array chip contains a complete A/D converter with a dynamic range of five decades. The 3/spl sigma/-homogeneity of the electrical response of the sensor array is better than 6% (10/sup -11/ A to 10/sup -7/ A) and better than 20% (10/sup -12/ A to 10/sup -7/ A). Proper operation of the chip is demonstrated with electrochemical and biological experiments.
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