Abstract
To realize the measurement and exact reconstruction of a pair of parallel profiles, a new scanning method using four displacement sensors as probes and different probe spacings has been invented with the advantage of preventing data processing error. The measuring device is placed between the measured objects and moved by a scanning stage to collect measurement data of both measured profiles. Considering many existing methods, the high lateral resolution of the reconstruction result and the rejection of the data processing error cannot always be achieved at the same time. When the measured profiles are in the short wavelength range, data processing errors are often on the same order of magnitude as the height difference of the measured profiles. The new method can eliminate both the straightness error of the measurement reference and the data processing error. The exact reconstruction retaining the high lateral resolution and without data processing error can be realized by rational position arrangement of sensors and corresponding processing method of the measurement data. The new method possesses the following advantages: (i) achievement of the exact reconstruction without data processing error; (ii) high lateral resolution not limited by probe spacing; (iii) concise operation without zero calibration of probes; and (iv) suitability for on-machine measurement. The feasibility and advantages of the new method were demonstrated by theoretical analyses, simulations, and experimental results.
Highlights
IntroductionScanning methods are widely used in the measurement and reconstruction of straightness profiles
Scanning methods are widely used in the measurement and reconstruction of straightness profiles.The motion trajectory of the measuring device always plays the role of the measurement reference, of which the error will have an impact on the final reconstruction result
For the on-machine measurement, as the machine tool spindle is used as a scanning stage, the error of the measurement reference is at the same level as the accuracy of the measured profiles
Summary
Scanning methods are widely used in the measurement and reconstruction of straightness profiles. We designed a four-probe method to reconstruct a pair of profiles, which can eliminate the reference errors and the zero-adjustment error through two scannings [21] All four of these methods have the same disadvantages as the methods for a single profile that, as mentioned above, the difficulty in satisfying the exact reconstruction without data processing error and retaining a high lateral resolution at the same time. In response to this type of problem, we propose a new four-probe system and its corresponding method to achieve an exact reconstruction of a pair of parallel profiles with high-density sampling points. In which probes are arranged at different spacings, the measured profiles can be exactly reconstructed, and the reconstruction profiles can reflect the characteristics of the measured objects better, especially for the profiles with stepwise variations
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