Abstract
Tactile sensors that acquire force and temperature information are key to machine tactile intelligence. In this article, an active tactile sensor incorporating an array of 3-D field-coupled thin-film transistors (FCTFTs) with a $4 \times 4$ pixelated polyvinylidene fluoride (PVDF)-based force and temperature sensors is studied. In order to enhance sensitivity and reduce power consumption, a 3-D FIN-shaped FCTFT is designed and a subthreshold operation is implemented. We have demonstrated its functions in human–machine interfacing, object characterization and recognition, force and temperature mapping, and dynamic force tracing. Such a tactile sensor array is promising for applications in machine tactile intelligence and humanoid robotics.
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