A Force and Temperature Sensor Array Based on 3-D Field-Coupled Thin-Film Transistors for Tactile Intelligence

Abstract

Tactile sensors that acquire force and temperature information are key to machine tactile intelligence. In this article, an active tactile sensor incorporating an array of 3-D field-coupled thin-film transistors (FCTFTs) with a $4 \times 4$ pixelated polyvinylidene fluoride (PVDF)-based force and temperature sensors is studied. In order to enhance sensitivity and reduce power consumption, a 3-D FIN-shaped FCTFT is designed and a subthreshold operation is implemented. We have demonstrated its functions in human–machine interfacing, object characterization and recognition, force and temperature mapping, and dynamic force tracing. Such a tactile sensor array is promising for applications in machine tactile intelligence and humanoid robotics.