Abstract
Abstract In this paper, a fluxgate magnetic sensor with silicon micro-technology is presented. The sensor is composed of micro-structured solenoids for the excitation and pick-up coils and permalloy cores formed by electropolating. This device is for a sensing element of the integrated silicon magnetic sensor with high sensitivity and high resolution. Two types of core structures have been fabricated. One is a rod-core sensor based on micromachining technology by using anisotropic etching for the deep groove formation, direct electron-beam lithography for patterning the metal wires on the groove, and selective electroplating for the rod-shaped permalloy core formation in the groove. The other is a thin-film core sensor made by using a similar but simpler process without the groove formation. Relatively high sensitivity and low-offset characteristics have been achieved compared with those of the conventional silicon magnetic sensors.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
