Abstract
This paper introduces a novel nano-positioning actuator with large displacement and drivingforce, termed a flexure-based electromagnetic linear actuator (FELA). It mainly comprisesan electromagnetic driving scheme and flexure-supporting bearings that provide infinitepositioning resolution and highly repeatable motion. In this work, analytical modeling ofthe proposed electromagnetic scheme and flexure mechanism is presented. Solutionsobtained from each model are evaluated by the experimental studies conducted on a FELAprototype. This prototype achieves a stroke of 4 mm with a positioning accuracy of ± 10 nm. With direct force control, it generates various force profiles with a force–current ratio of60 N A−1 and anaccuracy of ± 0.3 N. Such capabilities make FELA a promising solution for realizing ultra-high precisionlayer-over-layer fabrication in the nano-imprinting process.
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