Abstract
Precision contact probes have a huge demand in industrial manufacturing due to their high accuracy. However, the passive measurement mode of the existing probe easily causes wear of the probe ball and loss of accuracy during continuous contact scanning. In this paper, a PZT(piezoelectric actuators)-driven flexible probe is proposed with the dynamic time-domain function of the system response from low frequency to high drive frequency. The low-frequency measurement mode is established based on the linear response of the triangle wave. In order to avoid the trajectory nonlinearity of the stylus ball driven by PZT, the nonlinear mapping of the PZT hysteresis model is constructed by the BP neural network, and the linearly weighted particle swarm optimization (PSO) algorithm is used to realize the suppression of the response nonlinearity. Finally, the measurement experiment of the PZT-driven probe is conducted to reveal the measurement characteristics of low-frequency mode as well as measurement capability compared with commercial sensors.
Highlights
Precision probes have a wide range of applications in industrial manufacturing measurement
Based on the existing design of the probe, Cui et al [16] arranged an electric field on the stylus ball to realize a new non-contact measurement mode, and they proposed a photoelectric probe that does not rely on mechanical structures [17], which essentially solved the problem of friction
Based on the body of a three-dimensional flexible probe [9], this paper explores a measurement mode for lowfrequency vibration driven by piezoelectric actuators (PZT)
Summary
Precision probes have a wide range of applications in industrial manufacturing measurement. Based on the existing design of the probe, Cui et al [16] arranged an electric field on the stylus ball to realize a new non-contact measurement mode, and they proposed a photoelectric probe that does not rely on mechanical structures [17], which essentially solved the problem of friction. National Physics Laboratory (NPL) uses van der Waals force as a benchmark to propose a vibration measurement probe [14], [19], which uses high-frequency response and active strain feedback to achieve a real-time non-contact measurement mode. For most probes used for measuring machined parts, the continuous vibration at the resonance frequency will inevitably accelerate the collision and wear on the stylus ball due to the contact force that is hundreds of times higher than that of AFM. The time-varying force or displacement in the measurement will change the signal waveform of the system response in a non-interference state, where the changes of the signal magnitude and waveform are the key to obtaining highprecision measurement results
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