Abstract
This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.
Highlights
A Flexible Ultrasound Transducer Array with Micro-MachinedZhe Wang 1,2,†, Qing-Tang Xue 1,2,†, Yuan-Quan Chen 1,2, Yi Shu 1,2, He Tian 1,2, Yi Yang 1,2, Dan Xie 1,2, Jian-Wen Luo 3 and Tian-Ling Ren 1,2,*
Ultrasound transducers are core modules of medical imaging systems
A micro-machined flexible ultrasound transducer array is reported in this paper
Summary
Zhe Wang 1,2,†, Qing-Tang Xue 1,2,†, Yuan-Quan Chen 1,2, Yi Shu 1,2, He Tian 1,2, Yi Yang 1,2, Dan Xie 1,2, Jian-Wen Luo 3 and Tian-Ling Ren 1,2,*. Tsinghua National Laboratory for Information Science and Technology (TNList), Beijing 100084, China. Received: 30 October 2014 / Accepted: December 2014 / Published: January 2015
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