Abstract
Although two-dimensional (2D) layered molybdenum disulfide (MoS2) has widespread electrical applications in catalysis, energy storage, and photodetection, there are few reports available regarding sputtered MoS2 for piezoresistive sensors. In this research, we found that the resistance of magnetron sputtered MoS2 on a flexible substrate changed significantly and regularly when pressure was applied. Scanning electron microscope (SEM) and atomic force microscope (AFM) images revealed an MoS2 micro-grain-like structure comprising nano-scale particles with grooves between the particles. Chemical characterization data confirmed the successful growth of amorphous MoS2 on a polydimethylsiloxane (PDMS) substrate. A micro-thickness film flexible sensor was designed and fabricated. In particular, the sensor with a 1.5 μm thick polydimethylsiloxane (PDMS) substrate exhibited the best resistance performance, displaying a maximum ΔR/R of 70.39 with a piezoresistive coefficient as high as 866.89 MPa−1 while the pressure was 0.46 MPa. A proposed flexible pressure sensor based on an MoS2 film was also successfully used as a wearable pressure sensor to measure plantar pressure and demonstrated good repeatability. The results showed that the thin film pressure sensor had good piezoresistive performance and high sensitivity.
Highlights
As an important component of a signal acquisition unit, in a signal conversation, sensors act in the role of responding to external incentives
Carbon nanotubes (CNTs) [5,6,7] and graphene [8,9,10] are commonly used in flexible sensor sensitive film materials
Oxycontact angletreatment is closely related to theissurface wettability surface energy gen plasma technology a common meansand of surface modification ofOxygen plasma treatment technology is a common means of surface modification of
Summary
As an important component of a signal acquisition unit, in a signal conversation, sensors act in the role of responding to external incentives. In recent years, increasing signal acquisition and processing requirements under special circumstances have been demanded, and flexible sensors are playing an increasingly important role in electronic skin [1], intelligent wearables [2], medical care [3], industry electronics fields [4], etc. Carbon nanotubes (CNTs) [5,6,7] and graphene [8,9,10] are commonly used in flexible sensor sensitive film materials. They are used as excellent materials for flexible sensing sensitive films due to the advantages of high crystallinity, good electrical conductivity, and large specific surface area. There is an urgent need for developing new sensors with novel materials that have the function of flexible sensing but are easy to prepare and can be mass-produced
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