Abstract
This paper proposes a flexible ionization-conducted probe sensor for measuring detonation velocity produced by microcharges. Probe array structure is used to obtain multiple sets of data in finite charge length. Moreover, a flexible MEMS fabrication process based on Parylene interlayer is developed to achieve miniaturization and thin film of the probe and flexibility of the sensor. The detonation velocity measurements were performed on a booster explosive of 0.5mm×0.5mm and a primary explosive of 1mm×1mm. The experiment results suggest that an appropriate distance between two adjacent probe groups is 4mm, and the detonation velocity test system established in this paper is feasible for different microcharges. This study may lead to the development of effective methods for determining detonation velocity precisely of microcharges.
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