Abstract
In this paper, we present a novel micromachined hot-film flow sensor system realized by a technique using a film depositing processes and incorporating a standard printed circuit. Sensor electrodes and electronic circuits are preprinted on a flexible substrate of polyimide (PI), i.e., a flexible printed circuit board (FPCB). The sensing element, which is made of Cr/Ni/Pt with a temperature coefficient of resistance around 2,000 ppm/K, is fabricated on the FPCB by either magnetron sputtering technology or pulsed laser deposition (PLD). The sensor can be packed efficiently at high-density and integrated with signal processing circuits without additional pads. A simple fabrication process using mature technique and materials selection guarantees that the time and costs are greatly reduced. Both steady-state and transient characteristics of the sensors are experimentally tested, and the results presented to validate the effectiveness of the sensors.
Highlights
The measurement of fluid mechanics is very important in various industrial fields, and flow sensors have been widely applied to execute accurate and efficient measurements
The advantages of these sensors include simple structure, low-cost, and flexibility, being easy to attach on object surfaces, integrating good mechanical characteristics and sensing capability with electric circuits
We present a novel hot-film flow sensor with a flexible substrate
Summary
The measurement of fluid mechanics is very important in various industrial fields, and flow sensors have been widely applied to execute accurate and efficient measurements. Sensors 2009, 9 developed based on various sensing principles, such as thermal anemometry [1], Doppler frequency shift, and indirect inference from pressure differences [2,3,4] Among these sensors, thermal flow sensors possess merits of simple structure and easy use, and offer practical solutions for various fluidics applications [3]. We present a novel flow sensor using a flexible polyimide substrate, which is fabricated by integrating a standard flexible printed circuit technique with thin-film sputtering/deposition The advantages of these sensors include simple structure, low-cost, and flexibility, being easy to attach on object surfaces, integrating good mechanical characteristics and sensing capability with electric circuits. The steady and dynamic characteristics of the sensors and sensor system are systematically tested and the application prospects are analyzed
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