Abstract
A first step towards a microfabricated potentiometric thin-film sensor array for the simultaneous detection of Pb2+, Cd2+ and Cu2+ has been realized. The sensitive layers used are on the basis of chalcogenide glass materials. These thin-film chalcogenide glass materials that consist of mixtures of Pb-Ag-As-I-S, Cd-Ag-As-I-S or Cu-Ag-As-Se have been prepared by pulsed laser deposition technique. The developed sensor array has been physically characterized by means of scanning electron microscopy and Rutherford backscattering spectrometry. The electrochemical sensor characterization has been performend by potentiometric measurements.
Highlights
Nowadays, the development of cost-effective sensors and sensor systems for analytical tasks becomes more and more important
A videomicroscopic picture of the thin-film sensor array after the pulsed laser deposition (PLD) process is given in Figure 4 (a)
A first step towards a microfabricated thin-film sensor array on the basis of chalcogenide glass materials has been presented
Summary
The development of cost-effective sensors and sensor systems for analytical tasks becomes more and more important. Investigations of a macroscopic sensor array based on these conventional chalcogenide glass bulk electrodes already exist and the results are published in [8]. The major advantage of the PLD is the stoichiometric transfer of the complex target materials such as chalcogenide glasses (Pb-Ag-As-I-S, Cd-Ag-As-I-S, etc.) to a given substrate, the short process times and the fabrication compatibility to methods of silicon planar technology [9,10].
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