A finite element approach for 3-dimensional simulation of layered acoustic wave transducers

Abstract

Layered Surface Acoustic Wave (SAW) transducers were fabricated and modelled by finite-element method. A comparison of the frequency response of the measured devices and simulated structures are presented. The transducer structure is based on a two-port delay line, employing x-cut, y-propagating lithium niobate (LiNbO/sub 3/) substrate and a thin film zinc oxide (ZnO) guiding layer. A finite-element approach was employed to simulate a 3-dimensional version of the fabricated device. A transient analysis was conducted, where electrical and mechanical boundary values were applied. Simulation results show good agreement with experimental results, indicating that a finite-element approach is appropriate for modelling layered SAW transducers.