Abstract
A high-sensitive thickness shear mode film bulk acoustic resonator pressure sensor based on lateral field excitation is designed with its structure simulated in environment of air and liquids. A finite element model of film bulk acoustic resonator pressure sensor structure is established to obtain frequency variation under different pressure conditions by parameter sweep method when the multi-physics fields are added to the model. The results of simulation show that the pressure sensor’s resonance frequency is 2.114 GHz and pressure sensitivity is 1200 Hz/kPa in air. In liquid environment, film bulk acoustic resonator pressure sensor displays a pressure sensitivity of 325 Hz/kPa in ethanol, 475 Hz/kPa in deionized water, and 612.5 Hz/kPa in glycerol. This film bulk acoustic resonator pressure sensor has been proved to be highly sensitive both in air and liquid environment and has the potential to be used in biomedical applications.
Highlights
With tremendous development of micro- and nanotechnology, film bulk acoustic resonator (FBAR) has been widely used in mobile communications.[1,2,3] The successes in the field of FBAR based on filters motivate researchers to explore these applications in sensors.[4]
FBAR sensors are popular for many advantages, such as small size, small base mass, and IC compatibility, which make it possible to be integrated on a chip.[8,9,10,11,12,13]
FBAR is a kind of electro-acoustic device, which can be divided into longitudinal mode and thickness shear mode (TSM).[15]
Summary
With tremendous development of micro- and nanotechnology, film bulk acoustic resonator (FBAR) has been widely used in mobile communications.[1,2,3] The successes in the field of FBAR based on filters motivate researchers to explore these applications in sensors.[4]. Keywords Film bulk acoustic resonator, lateral field excitation, thickness shear mode, finite element method, pressure sensor International Journal of Distributed Sensor Networks liquid,[17,18] TSM FBAR in shear wave mode is suitable to sense pressure in liquid environment.[19] At present, there are two kinds of TSM FBARs, which are lateral field excitation (LFE) and thickness field excitation (TFE).[20] When the two electrodes of TFE FBAR are on both sides of the piezoelectric film, the electric field is exerted along thickness direction of piezoelectric film.
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