Abstract
The authors have built a surface scanning electron microscope incorporating a field emission electron gun. The gun has a brightness almost three order of magnitude higher than that of the ordinary thermionic electron gun, which is promissing high resolution in the secondary electron imaging mode.Emission current fluctuation, which is one of the most serious problems in field emission guns, depends on the vacuum condition around the field emission tip. In order to provide a good vacuum environment, the gun assembly in this microscope is located in the center of an ion-pump system which is symmetrically laid out relative to the electron optical axis. Two tips are mounted on a turret holder and they are exchangeable from the outside without disturbing the vacuum in the gun chamber. A stable emission current of the order of 10μA is obtainable at the normal vacuum operation better than 5x10-10 Torr.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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