A feasibility study towards traceable calibration of size and form of microspheres by stitching AFM images using ICP point-to-plane algorithm

Abstract

We present a new method for traceable calibration of size and form error of microspheres, which was realised by stitching a series of atomic force microscopic (AFM) images measured at different orientations of microspheres using the metrological large range AFM of the PTB. The stitching algorithm is achieved using an iterative closest point point-to-plane algorithm. As the AFM tip geometry is one of the most significant error sources for the developed method, it was traceably calibrated to a line width standard (type IVPS100-PTB), whose feature geometry was calibrated with a traceable route to the lattice constant of crystal silicon. Measurement setup, scan strategy, and data evaluation processes have been detailed in the paper. Measurement results show high stability and robustness of the developed method. For instance, the standard deviation of four repeated measurements reaches 5 nm, indicating promising performance.