Abstract
Solution methods of capacitively coupled plasmas (CCPs) have been facing a monumental challenge because the solution for the overwhelming number of radio frequency (RF) cycles is in demand before the plasma evolves to a time periodic steady state. It is known that the conventional solution methods require an extremely long calculation time, hence these methods would be limited in industrial applications that need a fast development period. In this paper, a new numerical simulation method for CCPs by COMSOL Multiphysics® is presented. The solution of CCPs in the time domain is converted to a boundary value problem in the additional dimension space to the computational space dimension of the CCP reactor. The fast solutions of the axisymmetric two-dimensional CCPs in Ar and Ar/N2 are performed and the computational efficiency is examined.
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