Abstract
Abstract A novel calibration scheme for fast accurate calibration of high sensitivity pressure transducers is proposed and verified by experiments. Based on theoretical analysis, the accuracy of the calibration for non-linearity, hysteresis and repeatability can be much higher than 1×10−4 for pressure transducers with an operation range of 1 kPa or below. For accurate calibration of sensitivity, a single conventional measurement is needed at the full range pressure. A conventional compensation pressure gauge can be used for the new calibration method. The calibration is very accurate and very fast; only a few seconds for a test point (or 10–20 min for a device). As the operation pressure is self-generating, no expensive pressure source is needed. The performances can be further improved if the design of the apparatus is optimized for the new calibration method according to the theoretical analysis.
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