Abstract
This work presents a facile method to fabricate concave microlens arrays (MLAs) with controllable shape and high fill factor on cylindrical silica glass by a femtosecond laser-enhanced chemical wet etching process. The hexagonal and rectangular MLAs are flexibly fabricated on the silica glass cylinder with a diameter of 3 mm. The morphological characteristics of MLAs are measured by a scanning electron microscope and a laser scanning confocal microscope. The measurements show that the good uniformity and high packing density MLA structures are generated. It has also been demonstrated that the shape and size of the concave structures could be easily tuned by changing laser power and the arrangement of laser exposure spots. The convex MLAs replicated by the polymer casting method experience excellent image quality.
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