Abstract
This paper reports on the fabrication and characterization of epitaxial Ni-Mn-Ga microactuators. Ni-Mn-Ga films are grown on heated single-crystalline MgO substrates by DC magnetron sputtering. X-ray diffraction measurements demonstrate epitaxial growth of the films. At room temperature, the crystal structure is identified to be non-modulated (NM) tetragonal martensite. Electrical resistance measurements confirm that the films display the martensitic phase transformation well above the Curie temperature TC of 325 K. Orientation-dependent magnetization measurements are performed to determine magnetic film properties. Micromachining of the Ni-Mn-Ga films is performed on an alumina substrate covered by a temporary adhesive layer. A transfer bonding process is developed to finally integrate the micromachined Ni-Mn-Ga structures to a target substrate in order to obtain NiMnGa microactuators having freely movable microparts. Temperature-displacement characteristics demonstrate the actuation performance of epitaxial NiMnGa microactuators for the first time.
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