Abstract
A gas discharge type FAB source has been studied as a primary beam source for SIMS. The source consists of an anode, two cathodes and Sm-Co ring magnets which produce axial magnetic field between the anode and the cathodes. A cold cathode discharge is generated between the anode and the cathodes after introducing oxygen gas into the source. Oxygen ions which are created in the glow of the discharge and then accelerated towards the cathode, become atoms again with high energy by capturing electrons through soft contact with oxygen molecules or by recombination with electrons. The fast oxygen atoms have kinetic energy of 400-3000eV and a flow of 1013-1014 atoms/sec. The neutralization coefficient of the fast atoms is less than 50%. SIMS spectra for Al are obtained by using the FAB source.
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