Abstract
A simple fluid–diaphragm coupling model for studying the dynamic performance of valveless micropumps is presented. The model includes fluid inertia and a squeeze film effect by solving the coupling equation simultaneously with the Reynolds equation. The model is validated with a valveless diffuser micropump actuated by either a piezoelectric or electromagnetic diaphragm. The performance of the pump is considered for pumping liquid and air. The resonant frequency and dynamic performance of the micropumps obtained by the model are in good agreement with the experimental data. The model can predict well the damping behavior of the pump.
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