Abstract
A novel positioning concept for high-speed scanning probe microscopy is presented in which a dual-stage nanopositioner is used for precise positioning over large areas at high speeds. The nanopositioner combines a low-bandwidth, large-range commercial scanner with a custom-designed high-speed scanner for short-range positioning. We present the mechanical design, finite element simulations and experimental characterization of the high-speed scanner, showing exceptionally clean dynamics, high linearity and large actuation bandwidth. The scanner is equipped with a magneto-resistive position sensing scheme that provides subnanometer resolution over a large bandwidth. Advanced model-based feedback controllers are designed according to a newly developed control design architecture with direct shaping of the closed-loop noise sensitivity and experimental results are presented in which the dual-stage system is used for high-speed imaging in a custom-built atomic force microscope.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
