A Dual-Axis MOEMS Accelerometer

Abstract

This paper is a report on the design and fabrication of a dual-axis micro-opto-electro-mechanical system (MOEMS) accelerometer. The device consists of a proof mass (PM) suspended by four L-shaped springs. Two Fabry-Perot (FP) cavities are formed between the cross-sections of the PM and the ends of two cleaved optical fibers in perpendicular directions (the X and Y axes). The acceleration causes the proof mass to move in the reverse direction relative to the applied acceleration. The sensor is fabricated by a silicon-on-insulator wafer. The fabricated sensor is characterized both by spectral monitoring and power measurements in the range of ±1 g. The results of spectral measurements show 3.23 nm/g (g = 9.81 m/s2: gravity constant) and 3.19 nm/g to the applied acceleration along the X and Y axes, respectively. Moreover, the obtained resolutions for the two directions of X and Y are $309~\mu \text{g}$ and $313~\mu \text{g}$ , respectively. Besides, the sensitivity of the sensor in power measurements is 550 mV/g and 528 mV/g in the X and Y directions, respectively. The sensor also possesses the resonant frequencies of 1382.5 Hz and 1398.6 Hz in the X and Y axes, respectively, in the range of ±1 g. The maximum cross-axis sensitivities obtained for this sensor are below 0.19% for each pair of X, Y, and Z axes. This value is fewer than the cross-axis sensitivity of most micro electro-mechanical systems without any post processing. This small value is a result of insensitivity of the FP spectrum to the lateral displacements of the PM.