Abstract
A dual-stage piezoelectric stack is presented. It consists of three parts, which are used for high-speed actuation, vibration isolation, and long-range actuation. This dual-stage piezoelectric stack is a modified piezoelectric stack and appears as a single stack. The first resonance frequency of the original piezoelectric stack is 40 kHz. The 1-dB cutoff frequency of the original piezoelectric stack is approximately 12 kHz, and the travel range is 16 μm. The 1-dB cutoff frequency of the dual-stage piezoelectric stack is approximately 85 kHz, and the travel range varies approximately from 1.2 to 12.8 μm. The main contribution of this paper is the use of a vibration isolation actuator to prevent coupling between high-speed and long-range actuators.
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