Abstract

This paper demonstrates a dual-mode actuation and sensing scheme for differential operation and self-calibration of axisymmetric Coriolis resonant gyroscopes. The proposed scheme actuates both modes of an axisymmetric gyroscope with two identical in-phase excitation signals, and senses both modes concurrently. This dual-mode actuation architecture utilizes the difference of the individual mode outputs to cancel out the common-mode bias terms, and provide rate-independent frequency split monitoring. The symmetry of the dual-mode architecture can be utilized to provide in-run scale factor calibration capability by mimicking the mechanical Coriolis force in the electrical domain, thereby providing a virtual electrical rotation to the gyroscope, to estimate the drift of the physical scale factor over time and temperature. The dual-mode architecture is demonstrated on a 2.625-MHz substrate-decoupled bulk acoustic wave gyroscope. The inherent bias cancellation provides sub-10°/hr bias instability, with $1.4\times $ improvement of angle random walk, as compared with the conventional single-mode actuation scheme. Benefiting from the in-run mode-matching capability, the dual-mode actuation scheme exhibits $45\times $ reduction of bias drift over a temperature range of [10–80] °C. In-run scale factor calibration achieves $150\times $ reduction of scale factor turn-on repeatability error down to 62 ppm, and over $100\times $ reduction of the temperature drift of scale factor over [10–50] °C.

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