A dual LC resonant circuit integrated wireless passive force and temperature sensor for harsh-environment applications

Abstract

This paper proposes a dual inductor-capacitor (LC) circuit integrated wireless and passive force and temperature sensor for the simultaneous measurement of force and temperature in high-temperature environments. The sensor is fabricated by a two-step process: the preparation of the Al2O3 substrate and the fabrication of the dual LC sensor with Ag paste using screen-printing technology and metallization. The variation in ambient force and temperature can be detected wirelessly by extracting the resonant frequencies of the antenna. The sensor can work in the force range of 0–10 N and temperature range of 25–500 °C with a maximum force sensitivity of 107 kHz/N at 500 °C and temperature sensitivity of 21.7 kHz/°C. To precisely measure the force, the temperature compensation method is proposed. The sensor has the advantages of low cost, simple fabrication and test, and high stability and repeatability, which are promising for the force and temperature application on the engine turbine blade in high-temperature environments.