Abstract
A novel dual-drive MEMS device integrated with both a thermal actuator and an electrostatic actuator is proposed and fabricated, which realizes the convenient in-situ electro-mechanical test for nanomaterials. The drive mode can be agilely selected to analyze different mechanical properties and the accuracy of the test can be verified by self-contrast of the two driving modes. Using the nanomanipulator as the transfer method, coupled mechanical and electrical tests are carried out for TiO2 nanowires. The measured Young's modulus of the nanowire in the two driving modes are 78.2 GPa and 85.6 GPa, and the fracture stress are 562 MPa and 584 MPa, respectively. The electron beam (e-beam) irradiation effect on electrical properties is investigated. Meanwhile, the resistance of the nanowires is determined as a variable of strain, which demonstrates the changes in resistance are the result of the loaded strains. The resistance decreases slightly after 2000 cycles of tensile, which is believed to be a delayed response brought about by electron beam irradiation. The experiment results indicate that the proposed MEMS device will facilitate the in-situ test of 1D/2D nanomaterials.
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