Abstract
This paper reports a dual-butterfly structure gyroscope based on the traditional butterfly structure. This novel structure is composed of two butterfly structures, each of which contains a main vibrational beam, four proof masses, and a coupling mechanism. The coupling mechanism in this proposed structure couples the two single butterfly structures and keeps the driving mode phases of the two single butterfly gyroscopes exactly opposite, increasing the double difference of traditional butterfly gyroscopes to a quad difference, which has the potential advantage of improving bias instability and g-sensitivity. The gyroscope was fabricated using a standard microfabrication method and tested in laboratory conditions. The experimental results show a Q-factor of 10,967 in driving mode and there were two peaks in the frequency responses curve of sensing direction due to unavoidable fabrication errors. Scale factor and bias instability were also measured, reaching a scale factor of 10.9 mV/°/s and a bias instability of 10.7°/h, according to the Allan Variance curve.
Highlights
Micro-gyroscopes are important Micro-electromechanical System (MEMS) inertial sensors with broad applications in civil and military fields [1]
A novel level coupling mechanism was developed and used in a series of tuning fork gyroscopes developed by UC Irvine to achieve anti-phase oscillation in both driving and sensing
This paper reports the design, simulation, theoretical analysis, fabrication, and measurement of
Summary
Micro-gyroscopes are important Micro-electromechanical System (MEMS) inertial sensors with broad applications in civil and military fields [1]. Anti-phase operation of tuning-fork structures is a common method for improving the performance of gyroscopes in terms of bias instability and g-sensitivity [13]. A novel level coupling mechanism was developed and used in a series of tuning fork gyroscopes developed by UC Irvine to achieve anti-phase oscillation in both driving and sensing. The traditional butterfly gyroscope, as mentioned and this kind of gyroscope was reported to reach an extremely high level of performance with a bias above, works in anti-phase mode in both driving direction and sensing direction in terms of the instability of 0.09◦ /h [19]. Some improvements to the of traditional butterfly gyroscopes have anti-phase mode in both driving direction andstructure sensing direction in terms of the four masses. Sensitivity will increase because of the doubled detection capacitance
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