A Discussion of the Mechanical Limitations of Machinery Used For Sample-Preparation Processes

Abstract

Abstract Failure analysts use a variety of machines for sample preparation, many of which are mechanical in nature. This article discusses the factors that determine the accuracy, resolution, and repeatability of XY positioning systems, rotary stages, and multiaxis machines. It identifies critical machine parameters and explains how environmental effects, runout, and geometric inaccuracies contribute to uncertainty and positioning error. It also assesses the precision, accuracy, and repeatability required for backside thinning and delayering systems.