Abstract
physica status solidi (a)Volume 132, Issue 2 p. K109-K112 Short Note A Discrete Defect Created during the Phosphorus Diffusion of High Voltage Planar Si Thyristors W. Storch, W. Storch Hahn-Meitner-Institut Berlin GmbH Search for more papers by this authorU. Mohr, U. Mohr Hahn-Meitner-Institut Berlin GmbH Former Zentralinstitut für Elektronenphysik, Berlin.Search for more papers by this authorL. Elstner, L. Elstner Hahn-Meitner-Institut Berlin GmbH Search for more papers by this authorR. Leihkauf, R. Leihkauf Hahn-Meitner-Institut Berlin GmbH Former Zentralinstitut für Elektronenphysik, Berlin.Search for more papers by this author W. Storch, W. Storch Hahn-Meitner-Institut Berlin GmbH Search for more papers by this authorU. Mohr, U. Mohr Hahn-Meitner-Institut Berlin GmbH Former Zentralinstitut für Elektronenphysik, Berlin.Search for more papers by this authorL. Elstner, L. Elstner Hahn-Meitner-Institut Berlin GmbH Search for more papers by this authorR. Leihkauf, R. Leihkauf Hahn-Meitner-Institut Berlin GmbH Former Zentralinstitut für Elektronenphysik, Berlin.Search for more papers by this author First published: 16 August 1992 https://doi.org/10.1002/pssa.2211320239 Außenstelle Adlershof, Rudower Chaussee 5, O-1199 Berlin, FRG. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinked InRedditWechat Volume132, Issue216 August 1992Pages K109-K112 RelatedInformation
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