Abstract
A direct approach is described for the automatic analysis of Rutherford backscattering spectra (RBS) obtained from homogeneous multi-element samples. Information to determine the constituent elements and their relative concentrations is taken directly from the spectra without resort to simulation. A computer algorithm is described in which application of a filter in the frequency domain of the Fourier-transformed original spectrum enhances the signal-to-noise ratio, thereby facilitating the analysis.
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