A digitally compensated 1.5 GHz CMOS/FBAR frequency reference

Abstract

A temperature-compensated 1.5 GHz film bulk acoustic wave resonator (FBAR)-based frequency reference implemented in a 0.35 microm CMOS process is presented. The ultra-small form factor (0.79 mm x 1.72 mm) and low power dissipation (515 microA with 2 V supply) of a compensated FBAR oscillator present a promising alternative for the replacement of quartz crystal frequency references. The measured post-compensation frequency drift over a 0-100 degrees C temperature range is < +/- 10 ppm. The measured oscillator phase noise is -133 dBc/Hz at 100 kHz offset from the 1.5 GHz carrier.