Abstract
This paper presents a novel digital miniaturization method for a prototype silicon micro-gyroscope (SMG) with the symmetrical and decoupled structure. The schematic blocks of the overall system consist of high precision analog front-end interface, high-speed 18-bit analog to digital convertor, a high-performance core Field Programmable Gate Array (FPGA) chip and other peripherals such as high-speed serial ports for transmitting data. In drive mode, the closed-loop drive circuit are implemented by automatic gain control (AGC) loop and software phase-locked loop (SPLL) based on the Coordinated Rotation Digital Computer (CORDIC) algorithm. Meanwhile, the sense demodulation module based on varying step least mean square demodulation (LMSD) are addressed in detail. All kinds of algorithms are simulated by Simulink and DSPbuilder tools, which is in good agreement with the theoretical design. The experimental results have fully demonstrated the stability and flexibility of the system.
Highlights
The silicon Micro-electromechanical Systems (MEMS) microgyroscope has been developed recently in the automotive industry as a kind of miniaturized angular rate sensor for several applications like rollover detection, inertial navigation, and the electronic stability programs
One board is designed for a precision analog interface with demodulated gyroscope signals and the other is for the data converters and Field Programmable Gate Array (FPGA) processing
The performance of the microgyroscope is greatly decided by the measure and control electronics
Summary
The silicon Micro-electromechanical Systems (MEMS) microgyroscope has been developed recently in the automotive industry as a kind of miniaturized angular rate sensor for several applications like rollover detection, inertial navigation, and the electronic stability programs. As is known, it has the merits of small volume, light weight, high reliability and low cost, it is easy to digitize and intellectualize and suitable for mass production. Apart from the micro structure design and vacuum packaging, the readout electronics for this inertial sensors have usually been realized using analog circuit technology by either PCB or ASIC. Some intelligent control and signal processing methods can be realized to enhance the stability and flexibility
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